JPH0438516Y2 - - Google Patents

Info

Publication number
JPH0438516Y2
JPH0438516Y2 JP1984010841U JP1084184U JPH0438516Y2 JP H0438516 Y2 JPH0438516 Y2 JP H0438516Y2 JP 1984010841 U JP1984010841 U JP 1984010841U JP 1084184 U JP1084184 U JP 1084184U JP H0438516 Y2 JPH0438516 Y2 JP H0438516Y2
Authority
JP
Japan
Prior art keywords
furnace
vertical
vertical furnace
reaction tube
furnace body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984010841U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60124032U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1084184U priority Critical patent/JPS60124032U/ja
Publication of JPS60124032U publication Critical patent/JPS60124032U/ja
Application granted granted Critical
Publication of JPH0438516Y2 publication Critical patent/JPH0438516Y2/ja
Granted legal-status Critical Current

Links

JP1084184U 1984-01-27 1984-01-27 半導体ウエハ処理用縦型炉 Granted JPS60124032U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1084184U JPS60124032U (ja) 1984-01-27 1984-01-27 半導体ウエハ処理用縦型炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1084184U JPS60124032U (ja) 1984-01-27 1984-01-27 半導体ウエハ処理用縦型炉

Publications (2)

Publication Number Publication Date
JPS60124032U JPS60124032U (ja) 1985-08-21
JPH0438516Y2 true JPH0438516Y2 (en]) 1992-09-09

Family

ID=30492393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1084184U Granted JPS60124032U (ja) 1984-01-27 1984-01-27 半導体ウエハ処理用縦型炉

Country Status (1)

Country Link
JP (1) JPS60124032U (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5841656A (ja) * 1981-09-04 1983-03-10 Mitsubishi Heavy Ind Ltd 薄板連続鋳造装置
JPS58116487U (ja) * 1982-02-03 1983-08-09 本田技研工業株式会社 自動二輪車用シ−ト

Also Published As

Publication number Publication date
JPS60124032U (ja) 1985-08-21

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